Last Update: 07 November, 2019.


  • Through-focus computation of point-spread functions
  • Aberration retrieval from through-focus intensity data
  • Extension to high-NA systems and extended objects
  • Image simulations for extended objects
  • Applications in optical lithography
  • ANZ: acoustical Nijboer-Zernike approach


Joseph J.M. Braat+, Peter Dirksen*, Sven van Haver+, Augustus J.E.M. Janssen#

#Eindhoven University of Technology , P.O. Box 513, 5600 MB Eindhoven, The Netherlands
+Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
*Philips Research Europe, HTC 4, 5656 AE Eindhoven, The Netherlands

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