Features
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Through-focus computation of point-spread functions
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Aberration retrieval from through-focus intensity data
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Extension to high-NA systems and extended objects
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Image simulations for extended objects
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Applications in optical lithography
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ANZ: acoustical Nijboer-Zernike approach
Authors
Joseph J.M. Braat+, Peter Dirksen*, Sven van Haver+, Augustus J.E.M. Janssen#
+Delft University of Technology,
Lorentzweg 1, 2628 CJ Delft, The Netherlands
*Philips Research Europe, HTC 4, 5656 AE Eindhoven, The Netherlands
#Eindhoven University of Technology , P.O. Box 513, 5600 MB Eindhoven, The Netherlands
*Philips Research Europe, HTC 4, 5656 AE Eindhoven, The Netherlands
#Eindhoven University of Technology , P.O. Box 513, 5600 MB Eindhoven, The Netherlands